JPH0645936Y2 - 透明電極基板 - Google Patents
透明電極基板Info
- Publication number
- JPH0645936Y2 JPH0645936Y2 JP13862088U JP13862088U JPH0645936Y2 JP H0645936 Y2 JPH0645936 Y2 JP H0645936Y2 JP 13862088 U JP13862088 U JP 13862088U JP 13862088 U JP13862088 U JP 13862088U JP H0645936 Y2 JPH0645936 Y2 JP H0645936Y2
- Authority
- JP
- Japan
- Prior art keywords
- film
- transparent electrode
- substrate
- transparent
- sog
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 title claims description 34
- 239000002184 metal Substances 0.000 claims description 30
- 229910052751 metal Inorganic materials 0.000 claims description 30
- 238000009792 diffusion process Methods 0.000 claims description 11
- 239000011521 glass Substances 0.000 claims description 5
- 239000010408 film Substances 0.000 description 76
- 238000000034 method Methods 0.000 description 10
- 239000010409 thin film Substances 0.000 description 9
- 238000005530 etching Methods 0.000 description 6
- 239000004973 liquid crystal related substance Substances 0.000 description 4
- 238000004528 spin coating Methods 0.000 description 4
- 238000001312 dry etching Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- SCPYDCQAZCOKTP-UHFFFAOYSA-N silanol Chemical compound [SiH3]O SCPYDCQAZCOKTP-UHFFFAOYSA-N 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Landscapes
- Liquid Crystal (AREA)
- Parts Printed On Printed Circuit Boards (AREA)
- Electrodes Of Semiconductors (AREA)
- Thin Film Transistor (AREA)
- Non-Insulated Conductors (AREA)
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13862088U JPH0645936Y2 (ja) | 1988-10-26 | 1988-10-26 | 透明電極基板 |
| CA000613680A CA1313563C (en) | 1988-10-26 | 1989-09-27 | Thin film transistor panel |
| US07/415,889 US5084905A (en) | 1988-10-26 | 1989-10-02 | Thin film transistor panel and manufacturing method thereof |
| DE68923054T DE68923054T2 (de) | 1988-10-26 | 1989-10-25 | Dünnschicht-Transistortafel und Herstellungsverfahren. |
| EP89119842A EP0366116B1 (en) | 1988-10-26 | 1989-10-25 | Thin film transistor panel and manufacturing method thereof |
| KR1019890015469A KR940004764B1 (ko) | 1988-10-26 | 1989-10-26 | 박막트랜지스타 판넬 및 제조방법 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13862088U JPH0645936Y2 (ja) | 1988-10-26 | 1988-10-26 | 透明電極基板 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0262419U JPH0262419U (en]) | 1990-05-10 |
| JPH0645936Y2 true JPH0645936Y2 (ja) | 1994-11-24 |
Family
ID=31401121
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13862088U Expired - Lifetime JPH0645936Y2 (ja) | 1988-10-26 | 1988-10-26 | 透明電極基板 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0645936Y2 (en]) |
-
1988
- 1988-10-26 JP JP13862088U patent/JPH0645936Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0262419U (en]) | 1990-05-10 |
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